CVD Equipment
TCVD-D100CA
Thermal Chemical Vapor Deposition
The main Thermal CVD technology involves adding gases to the pressurized reactor at high temperature of about 1,000℃ where thin film is synthesized onto substrates.
Size
2300(W) x 1770(H) x 750(D)
Features
Size (mm) : 2300(W) x 1770(H) x 750(D)
Advanced Computer Controlled Automatic System
Optimized for graphene, CNT, h-BN TMDC growth
Water-cooled end chambers and doors
Process Temperature: ~1,100 ℃
Uniformity of Film Thickness : ≤+-3%
Testing Uniformity : ≤+-3%
Movable furnace method is our unique knowhow for fast heating fast cooling of the sample.
* Price will be determined after consultation. (Different customization from the standard parts will affect the overall price.)
Advanced Computer Controlled Automatic System
Optimized for graphene, CNT, h-BN TMDC growth
Water-cooled end chambers and doors
Process Temperature: ~1,100 ℃
Uniformity of Film Thickness : ≤+-3%
Testing Uniformity : ≤+-3%
Movable furnace method is our unique knowhow for fast heating fast cooling of the sample.
* Price will be determined after consultation. (Different customization from the standard parts will affect the overall price.)
Advantage
Specifications
Thermal CVD Auto Operation system
Both End chamber(Stainess) - All parts cooling by water
Quartz Main chamber
Gas control unit ( Mass flow controller) - 3channel standard
340liter/min Oil rotary pump
Pneumatic On/off valve with Down stream Auto pressure control Throttle valve
with controller
Programmable Temperature controller
High Temperature Furnace(Max1200℃)
Rapid Cooling system by furnace moving
Atmospheric and Vacuum Processing
Anti-contamination system by inner tube
Vacuum gauge unit(Capacitance/Convectron)
1 year warranty
On-site install and training
System Program ( Auto processing system)
Furnace for source evaporation
Safety interlock system(Water / Air)
Both End chamber(Stainess) - All parts cooling by water
Quartz Main chamber
Gas control unit ( Mass flow controller) - 3channel standard
340liter/min Oil rotary pump
Pneumatic On/off valve with Down stream Auto pressure control Throttle valve
with controller
Programmable Temperature controller
High Temperature Furnace(Max1200℃)
Rapid Cooling system by furnace moving
Atmospheric and Vacuum Processing
Anti-contamination system by inner tube
Vacuum gauge unit(Capacitance/Convectron)
1 year warranty
On-site install and training
System Program ( Auto processing system)
Furnace for source evaporation
Safety interlock system(Water / Air)
Options
Max temp 1500℃ Furnace by SIC source
Rapid thermal processing furnace by IR lamp source
MF power induction heating process Max temp 1600℃
MFC(Mass flow controller) addition total 12channel
Dry vacuum pump ( Scroll / booster / industry)
Gas Safety interlock system for gas leak
RF plasma ( ICP type )
Tungsten filament gas source cracking
High Vacuum processing option
(Pump/Gauge/valve unit)
Source delivery system ( Bubbler / Gas / Solid )
System Utility ( Chiller / scrubber / gas cabinet )
Rapid thermal processing furnace by IR lamp source
MF power induction heating process Max temp 1600℃
MFC(Mass flow controller) addition total 12channel
Dry vacuum pump ( Scroll / booster / industry)
Gas Safety interlock system for gas leak
RF plasma ( ICP type )
Tungsten filament gas source cracking
High Vacuum processing option
(Pump/Gauge/valve unit)
Source delivery system ( Bubbler / Gas / Solid )
System Utility ( Chiller / scrubber / gas cabinet )
Consumable Parts
K-type Thermocouple (Option : R-type)
Furnace heating element (Furnace repair)
Vacuum sensor
Oil in Rotary Oil Pump
O-ring
Quartz tube
Furnace heating element (Furnace repair)
Vacuum sensor
Oil in Rotary Oil Pump
O-ring
Quartz tube
Customer List
| Seoul National University |
Layout
Quality Assurance
Graphene Square provides customers who purchase equipment with a one-year warranty on all accessories (except quartz glass and rubber O-rings).
If you find a part abnormality or system error in your equipment within the period, please contact us immediately and a repairman will be dispatched immediately within 24 hours.
If you find a part abnormality or system error in your equipment within the period, please contact us immediately and a repairman will be dispatched immediately within 24 hours.
Delivery period
All equipment that has been manufactured and inspected will be delivered on the same day to the place you have designated.
Equipment Purchase Process
01
Quotation Request
Quotation Request and Quotation provided
02
Confirmation of intention to purchase
Customer's intention to purchase
(Purchase Order from Customer)
03
Invoice / Payment
Provide Invoice and Payment data
04
Provide Production • Training program
Provide machine production and training program upon completion of the first deposit
05
Equipment Operation Test /
Product packaging, Shipment
After production is completed, product packaging and shipping are carried out
06
Arrival is completed
Arrival is completed at the customer site
within up to 4 days